Linear Reluctance Actuator with Low Retention Force
Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany
Positioners for the micro and nano range are often designed as systems with flexure guide, actuator and sensor. The actuator generates either a force (e.g. magnetic, electrostatic) or displacement (e.g. piezo) and is connected to the flexure guide. The magnetic force can be generated basically in two ways, firstly by a Lorentz force motor (voice-coil-type actuator) or secondly by a reluctance force motor. The disadvantage of the combination of Lorentz force motors and flexure guides is the necessity of generating constantly a force in order to maintain a
position, except for the equilibrium position, of course. Therefore such positioners always generate a certain amount of heat, which is an undesired side-effect, especially in high precision applications. This paper describes a reluctance force motor in combination with a flexure guide that overcomes this disadvantage. The reluctance force is linearized due to the shape of the magnetic circuit and compensated by the spring force. Thus a flexureguided drive is possible that can maintain its position over a certain range nearly without power dissipation.
ACTUATOR 2014 Manuscript B1.5
Publication date: 08/04/2015
Manuscript B1.5 published in Conference Proceedings ACTUATOR 2014
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