ACTUATOR 2014 Manuscript C3.2

Author: Hubert Borgmann
Pages: 4
Language: English
Publication date: 09/04/2015
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Manuscript C3.2 published in Conference Proceedings ACTUATOR 2014
Monolithic Micro-Positioning Stage in Piezo Thick Film Technology

B. Bramlage, D. Ernst, S. Gebhardt
Fraunhofer IKTS, Dresden, Germany

Piezoceramic thick film technology introduced a novel and efficient method for the fabrication of active bending structures, especially for complex actuator layouts. Here, we present a monolithic micro-positioning stage based on piezoceramic thick film technology. It conducts a planar lift of a platform or optical component. The four bending actuators are comprised of both d33- and d31-mode elements, performing an s-bend that minimizes torque induced into the platform. FEM simulations aid in the design process of the actuator layout. They are fabricated by screen printing on an Al2O3 substrate with a final thickness of 115 μm in the piezoceramic layer and a structured electrode allows for both in-plane and through-thickness aligned fields in the corresponding elements. Operated at 1.66 kV/mm in both elements, a planar lift exceeding 130 μm is demonstrated. With a final device thickness of less than 500 μm it provides the actuator component in the development of a lowprofile optical system employing microlens arrays.
El vendedor asume toda la responsabilidad de esta entrada.
Hubert Borgmann, MESSE BREMEN,
Project Manager ACTUATOR, International Conference and Exhibition on New Actuators and Drive Systems, Bremen, Germany, and Editor of the ACTUATOR Conference Proceedings (
Project Manager ITHEC, International Conference and Exhibition on Thermoplastic Composites, Bremen, Germany, and Editor of the ITHEC Conference Proceedings (

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