Planar Magnetic Levitation in 6 DOF
R. Glöß, Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany
The paper describes a new magnetic levitation system for 6 DOF with nanometer resolution. The system consists of a movable stage with 8 Halbach arrays and a grid for 4 optical incremental sensors, and 8 analog hall sensors. The electromagnetic forces to lift and move the stage in all directions, are generated in a 12-layer PCB board by a 144-coil design. Pulse-width modulated (PWM) drivers with 350 kHz frequency are directly coupled at the main board. A new multi-core controller connects the 48 PWM drivers, the optical and magnetic reference sensors with the main processor unit with hardware and firmware real-time synchronization for force and momentum calculations.
ACTUATOR 2016 Manuscript C6.2
Publication date: 01/06/2016
Manuscript C6.2 published in Conference Proceedings ACTUATOR 2016
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