ACTUATOR 2016 Manuscript C6.2

Author: Hubert Borgmann
Pages: 2
Language: English
Publication date: 01/06/2016
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Manuscript C6.2 published in Conference Proceedings ACTUATOR 2016
Planar Magnetic Levitation in 6 DOF

R. Glöß, Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany

The paper describes a new magnetic levitation system for 6 DOF with nanometer resolution. The system consists of a movable stage with 8 Halbach arrays and a grid for 4 optical incremental sensors, and 8 analog hall sensors. The electromagnetic forces to lift and move the stage in all directions, are generated in a 12-layer PCB board by a 144-coil design. Pulse-width modulated (PWM) drivers with 350 kHz frequency are directly coupled at the main board. A new multi-core controller connects the 48 PWM drivers, the optical and magnetic reference sensors with the main processor unit with hardware and firmware real-time synchronization for force and momentum calculations.
El vendedor asume toda la responsabilidad de esta entrada.
Hubert Borgmann, MESSE BREMEN,
Project Manager ACTUATOR, International Conference and Exhibition on New Actuators and Drive Systems, Bremen, Germany, and Editor of the ACTUATOR Conference Proceedings (
Project Manager ITHEC, International Conference and Exhibition on Thermoplastic Composites, Bremen, Germany, and Editor of the ITHEC Conference Proceedings (

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