Nanometric Linear Piezo-Actuator with Integrated Strain Gages for High Stability Positioning
T. Porchez, F. Barillot, C. Belly
Cedrat Technologies SA, Meylan, France
Many applications require a mechanism capable of nanometric resolution position tuning, and with the ability to maintain perfectly this position for a long time (more than several days). For those applications, piezo-actuators are a perfect fit since they easily provide nanometric resolution. However, they require the use of a position sensor to be able to maintain stable position over time. Until now, the long-term stability of strain gages (SG) for position measurement was questionable. Using its extensive know-how of strain gages integration and new instrumentation equipment, Cedrat Technologies has managed to demonstrate the ability of a piezo-mechanism with integrated strain gages sensors to achieve nanometric position stability. This technology opens new
possibilities for industrial, aeronautical, and space applications.
ACTUATOR 2016 Manuscript P 08
Publication date: 01/06/2016
Manuscript P 08 published in Conference Proceedings ACTUATOR 2016
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