Ultrasonic Motor Using Independently Driven Surface Electrodes of a Piezoelectric Plate
B. Koc, M. Thelen
Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany
Both the top and bottom large surfaces on a piezoelectric plate have two conductive electrodes that are dividing the plate into two regions along the width and length directions. The vibrator is electrically driven by two signals with independent grounds. The applied signal on the top electrode excites longitudinal resonance modes generating vibrations only in the length direction. The other applied signal on the bottom electrodes excites only the flexural resonance mode generating vibrations only in the width direction. The generated vibrations in length and width directions are not only orthogonal, but also their magnitudes are independently controlled by magnitudes of the corresponding top and bottom driving signals.
ACTUATOR 2014 Manuscript B4.3
Publication date: 09/04/2015
Manuscript B4.3 published in Conference Proceedings ACTUATOR 2014
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