Effects of Excess Energy on Thin Film Actuator Formation by Ion Plating Process
C. Niyomwaitaya, A. Sakai, M. Amano, Y. Ezaki, R. Toyoda, T. Iijima, A. Tonegawa, Y. Matsumura
Tokai University, Hiratsuka-shi, Japan
Magnetrostrictive materials have been investigated as potential materials for actuator of micro electro mechanical systems (MEMS). Fe magnetostrictive thin films were prepared by IP process with dual vapor source. In this Study, magnetostrictive thin film was discussed about effects of excess energy on the nanostructure of thin films. Excess energy of IP process was increased with increasing of applied bias voltage of positive electrode. Kinetic energy of ion and ionization rate in evaporation particles were measured by Langmuir probe and Faraday cup respectively. The composition of films was controlled by ratio of Fe and other alloy deposition rate that measured by using crystal oscillator. In X-ray diffraction analysis, crystal structures of all samples were α-Fe bcc structures because lattice expansion that changes with a changing in applied bias voltage. At the same time lattice distortion energy in Fe increased with increasing alloy content. Thus, these
results were shown that solid solubility limit and crystallographic characterization of film are controllable by ion plating process.
ACTUATOR 2014 Manuscript Poster 28
Publication date: 10/04/2015
Manuscript Poster 28 published in Conference Proceedings ACTUATOR 2014
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