A Si3N4/Polyimide Based Thermo-Pneumatic Actuator for Precisely Fluids Injection in Lab-On-Chip
J. Yunas, N. Abd. Hamid, B. Yeop Majlis
Universiti Kebangsaan Malaysia, Bangi, Malaysia
In this paper, a study on the design and fabrication of thermal pneumatic actuator utilizing thin Si3N4/polyimide membrane is reported. Surface and bulk micromachining processes with an additional bonding process are implemented for the fabrication of the system in lab-on-chip. Beside the study on the technological aspects of the actuator structure, this work explores also its geometrical consideration by varying the shapes and sizes of the membrane to find optimum mechanical deformation of the thin film Si3N4/polyimide. The layer combination of the membrane consisting of Si3N4 and Polyimide layer is designed in order to increase the reliability of the membrane layer against heat radiation while maintaining its flexibility. The functionality test of the system is done by measuring the membrane deflection under heat influence inside the chamber.
ACTUATOR 2014 Manuscript Poster 34
Publication date: 10/04/2015
Manuscript Poster 34 published in Conference Proceedings ACTUATOR 2014
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