Optimization of Non-Linear Piezoelectric Actuators Driven by Interdigitated Electrodes
M. Mohammed Zaki, S. Zähringer, N. Schwesinger
Technische Universität München, München, Germany
Piezoelectric actuators driven by single sided surface electrodes represent a very simple form of actuators which are very useful for a number of applications. The use of surface electrodes requires high electric fields which induce large stress in the piezoelectric ceramic. This paper deals with the optimization of a unique surface electrodes design, along with its fabrication on a 100 μm thick PZT substrate and its characterization.
ACTUATOR 2014 Manuscript Poster 35
Publication date: 10/04/2015
Manuscript Poster 35 published in Conference Proceedings ACTUATOR 2014
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