Pulse Width Modulation for Optimal Actuation of Piezoelectric IDT Membrane Actuators
S. Zähringer, M. Spornraft, N. Schwesinger
Technische Universität München, München, Germany
Using ferroelectric bulk material for membrane actuators driven by interdigitated surface electrodes offers several advantages. Considering conventional piezoelectric hybrid bimorphs or piezoelectric thinfilm devices, a passive membrane is needed either to mount the piezoelectric actuator or to deposit the piezoelectric material. With interdigitated surface electrodes on ferroelectric bulk material, the bulk material itself functions as membrane and actuator, due to the induced inhomogeneous stress distribution. These inhomogeneous stress and strain distributions are caused by the inhomogeneous distributed electric field in between the surface electrodes.
The employed ferroelectric material, namely lead zirconate titanate (PZT), shows the typical ferroelectric polarisation hysteresis and also the according deformation hysteresis, therefore leading to a remanent deformation of the polarized membrane actuator. To circumvent that deformation a positive pulse width modulated square signal can be applied to initially unpolarised actuators.
ACTUATOR 2014 Manuscript Poster 37
Publication date: 10/04/2015
Manuscript Poster 37 published in Conference Proceedings ACTUATOR 2014
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