Linear Piezoelectric Actuator for Precision Linear Positioning
Y. Shi, J. Zhang, C. Chen
Nanjing University of Aeronautics & Astronautics, Nanjing, China
This paper presents a new butterfly-shaped linear piezoelectric actuator for linear translation. A two-degree positioning stage driven by the linear ultrasonic motor has a very simple and compact structure, which makes the system obtain shorter driving chain. First, the drive principle of the linear ultrasonic motor are analysed. The use of the symmetric modal and anti-symmetric modal of the transducer (stator) realizes the function of driving the slider pressed on the driving feet twice in one cycle. Second, the structure of the two-degree position stage system is described in detail. Finally, the characteristics of the two-degree positioning stage are investigated. Experiments indicate that the stage motion driven by the motor can be controlled to the target position plus or minus _0.5 μm for a traveling distance of 50 mm in the closed-loop condition.
ACTUATOR 2014 Manuscript Poster 40
Publication date: 10/04/2015
Manuscript Poster 40 published in Conference Proceedings ACTUATOR 2014
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