ACTUATOR 2014 Manuskript C4.3

Author: Hubert Borgmann
Pages: 4
Language: English
Publication date: 26/05/2015
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Manuscript C4.3 published in Conference Proceedings ACTUATOR 2014
Polymer In-Plane Electrothermal Actuators Fabricated by UV-Lithography Versus Micro-Milling

C. Nakic, M. Staab, R. Dörr, H.F. Schlaak
Technische Universität Darmstadt, Darmstadt, Germany

This work presents the comparison of UV-Lithography of SUEX dry films and micro-milling of the high
temperature polymer polyether ether ketone (PEEK) sheets as fabrication technologies for a two-directional electrothermal positioning platform. The platform consists of a monolithic kinematic system, actuated by local thermal expansion due to defined Joule heating. Samples are manufactured with both technologies and characterized. A yield of 71.4% is observed for the SUEX process and 12.5% for the PEEK process. The SUEX samples allow deflections up to 177.1 μm x 119 μm, the PEEK samples reach 120.5 μm x 90.3 μm.
El vendedor asume toda la responsabilidad de esta entrada.
Hubert Borgmann, MESSE BREMEN,
Project Manager ACTUATOR, International Conference and Exhibition on New Actuators and Drive Systems, Bremen, Germany, and Editor of the ACTUATOR Conference Proceedings (
Project Manager ITHEC, International Conference and Exhibition on Thermoplastic Composites, Bremen, Germany, and Editor of the ITHEC Conference Proceedings (

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