Polymer In-Plane Electrothermal Actuators Fabricated by UV-Lithography Versus Micro-Milling
C. Nakic, M. Staab, R. Dörr, H.F. Schlaak
Technische Universität Darmstadt, Darmstadt, Germany
This work presents the comparison of UV-Lithography of SUEX dry films and micro-milling of the high
temperature polymer polyether ether ketone (PEEK) sheets as fabrication technologies for a two-directional electrothermal positioning platform. The platform consists of a monolithic kinematic system, actuated by local thermal expansion due to defined Joule heating. Samples are manufactured with both technologies and characterized. A yield of 71.4% is observed for the SUEX process and 12.5% for the PEEK process. The SUEX samples allow deflections up to 177.1 μm x 119 μm, the PEEK samples reach 120.5 μm x 90.3 μm.
ACTUATOR 2014 Manuskript C4.3
Publication date: 26/05/2015
Manuscript C4.3 published in Conference Proceedings ACTUATOR 2014
El vendedor asume toda la responsabilidad de esta entrada.