A Fast and Nanometre Accurate MultiDrive Piezomotor
J. Peirs1, A. Santoso2, S. Cappa1, B. Kersschot1, F. Al Bender2, D. Reynaerts2
1Xeryon bvba, Leuven, Belgium
2Katholieke Universiteit Leuven, Leuven, Belgium
The presented research reports about the development and testing of a new type of piezomotor capable of achieving both high speeds (400 mm/s) and nanometre accuracy (1 nm). The resulting motor is referred to as the MultiDrive piezomotor. The MultiDrive piezomotor combines the high-speed performance of an ultrasonic piezomotor (in the resonant mode) with the fine positioning ability of a flexure stage (in the direct mode). Both modes can be operated independently or simultaneously through a dedicated signal generation and control system. The MultiDrive Piezomotor has been tested for different trajectories showing lower tracking errors through the combination of both working modes compared to an exclusively ultrasonic operation.
ACTUATOR 2014 Manuskript Poster 62
Publication date: 26/05/2015
Manuscript Poster 62 published in Conference Proceedings ACTUATOR 2014
El vendedor asume toda la responsabilidad de esta entrada.