Fast SPM Scanning Stage
E. Guliyev1, A. Ahmad1, M. Kästner1, T. Angelov1, S.Lenk1, I. Atanasov1, N. Nikolov3, T. Ivanov1,
K. Szostak1,2, M. Holz1,2, A. Reum1,2, M. Hofer1,2, K. Nieradka1, T. Hrasok1, H. Lipowicz1,2,
B. Volland1, V. Ishchuk1, J.-P. Zöllner1, and I.W. Rangelow1
1Technische Universität Ilmenau, Ilmenau, Germany
2nano analytik GmbH, Ilmenau, Germany
3Mikrosistemi Ltd, Varna, Bulgaria
We developed novel nano-positioning stage based on a compact piezoelectric stacks integrated within Silicon frame, allowing the construction of a scanner with a 6 μm-scanning range at high frequencies. A displacement of a sample holder has been measured through implanted piezoresistive sensors within the flexures of the silicon stage. Self-actuated and self-sensing nano-cantilever of high-frequency is being the core of the experimental setup. An active cantilever (self-actuated and self-sensing) has been designed, modelled, fabricated, and characterized, and
key features of simplicity in terms of installation and operation have been achieved.
ACTUATOR 2014 Manuskript Poster 76
Publication date: 26/05/2015
Manuscript Poster 76 published in Conference Proceedings ACTUATOR 2014
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