Development of a Piezoelectric Micro Switch
L. Seyfert, S. Zähringer, C. Müller, S. Buhr, N. Schwesinger
Technische Universität München, München, Germany
Piezoelectric membrane actuators present a growing and dynamic sector in micromechanical applications. Fields of application are high-precision regulators, micro pumps or micro valves. In this point of view, a new actuator concept with single side electrodes was developed. As part of this concept many different electrode layouts were analysed. One of these was an actuator with a star shaped electrode layout. When actuated under forward bias and fixed clamping, this actuator shows an “upward” movement in direction of the active side of the membrane, meaning the side carrying the electrodes. Compared to common piezoelectric membrane actuators this behaviour is unique. This paper presents a practical and mobile application to prove this upward movement and
to demonstrate the function of this new actuator. To prepare this actuator for other future applications such as micro valves a simple configuration in a form of a micro switch was built.
ACTUATOR 2016 Manuscript A1.7
Publication date: 01/06/2016
Manuscript A1.7 published in Conference Proceedings ACTUATOR 2016
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