Miniature Piezoelectric Multilayer Actuators and their Applications (Review)
W.A. Groen, Delft University of Technology, Delft, and TNO Holst Centre, Eindhoven, The Netherlands
P. Pertsch, PI Ceramic GmbH, Lederhose, Germany
Piezoelectric multilayer actuators are well suited driving elements for miniaturized electro mechanical systems with geometrical dimensions in the lower millimeter range. They have properties like high electromechanical energy conversion rate at small volume, low driving voltages, high displacement resolution as well as large bandwidth for very dynamic mechanical signals. The manufacturing process of miniaturized co-fired piezoelectric multilayer actuators is described in the first part of the paper. It addresses technological challenges like small grain size piezoceramic materials, layer thicknesses smaller than 20 μm, low lateral manufacturing tolerances as well as appropriate termination electrode technologies.
The second part of the paper gives a survey on recent applications of such miniaturized actuators in acoustical and optical systems, in hard disc drives, in ultrasonic motors as well as in micro fluidic assemblies like micro pumps and ink jet devices.
ACTUATOR 2016 Manuscript B3.0
Publication date: 01/06/2016
Manuscript B3.0 published in Conference Proceedings ACTUATOR 2016
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