Resonant Three-Dimensional Electrostatic Actuator in Silicon Technology
B. Goj, L. Dressler, L. Dittrich, M. Hoffmann
Technische Universität Ilmenau, Ilmenau, Germany
We introduce a controlled triaxial electrostatic actuator which is suitable for multiple applications such as force sensing, microprobing, nanoindenting and cell manipulation. The system comprises an arrangement of serpentine springs, three independently controlled electrostatic actuators, one for each Cartesian direction, and a stylus featuring a ruby ball that is utilised as force transducer. The design, the calculation and the characterisation of the triaxial electrostatic actuator are presented. Crucial features of the actuator are the multiple application scenarios, the compact design, the low actuation voltage and the independent motion in three Cartesian directions even though a shared suspension is employed.
ACTUATOR 2016 Manuscript C3.1
Publication date: 01/06/2016
Manuscript C3.1 published in Conference Proceedings ACTUATOR 2016
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