ACTUATOR 2016 Manuscript P 53


Author: Hubert Borgmann
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Pages: 3
Language: English
Publication date: 01/06/2016
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Manuscript P 53 published in Conference Proceedings ACTUATOR 2016
Internal Stress Effects on Magnetostrictive Properties of Sputtered Giant Magnetostrictive Thin
Films

S. Sakano, R. Toyoda, A.A.Y Mansi, T. Washihira, Y. Matsumura
Tokai University, Hiratsuka-shi, Japan

Abstract:
Internal stress of the Sm-Fe thin films was investigated considering ion bombardment. The Sm-Fe thin films were deposited by DC magnetron sputtering process with various substrate bias voltage. The effect of ion bombardment on internal stress of Sm-Fe thin films was estimated by the ion bombardment parameter Pi. The ion bombardment parameter Pi increased with increasing negative substrate voltage. Internal stress of Sm-Fe thin films showed a larger compressive stress with increasing amount of the ion bombardment parameter Pi. The magnetostrictive susceptibility of Sm-Fe thin films was improved by increasing compressive stress. The magnetostrictive susceptibility of the Sm-Fe thin film was dependent on the Pi.
El vendedor asume toda la responsabilidad de esta entrada.
Hubert Borgmann, MESSE BREMEN,
Project Manager ACTUATOR, International Conference and Exhibition on New Actuators and Drive Systems, Bremen, Germany, and Editor of the ACTUATOR Conference Proceedings (www.actuator.de)
Project Manager ITHEC, International Conference and Exhibition on Thermoplastic Composites, Bremen, Germany, and Editor of the ITHEC Conference Proceedings (www.ithec.de)

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